Publication:
Electron-induced fragmentation mechanisms in organic monomers and their implications for photoresist optimization for EUV lithography
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1352 since deposited on 2021-11-02
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Acq. date: 2026-02-28
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Statistics
Views
1352 since deposited on 2021-11-02
3last month
2last week
Acq. date: 2026-02-28
Citations