Browsing by Author "Huard, Chad M. M."
Now showing 1 - 1 of 1
- Results Per Page
- Sort Options
Publication Evolution of lithography-to-etch bias in multi-patterning processes
;Panneerchelvam, Prem ;Agarwal, Ankur ;Huard, Chad M. M. ;Pret, Alessandro VaglioMani, AntonioJournal article2022, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, (40) 6, p.062601