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Browsing by Author "Huard, Chad M. M."

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    Publication

    Evolution of lithography-to-etch bias in multi-patterning processes

    Panneerchelvam, Prem
    ;
    Agarwal, Ankur
    ;
    Huard, Chad M. M.
    ;
    Pret, Alessandro Vaglio
    ;
    Mani, Antonio
    Journal article
    2022, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, (40) 6, p.062601

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