Browsing by Author "Hub, W."
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Publication Alkaline cleaning of silicon wafers: additives for the prevention of metal contamination
Journal article1999, Microelectronic Engineering, (45) 2_3, p.197-208Publication Effect of metal contamination and improved cleaning strategies
Proceedings paper1999, Defects in Silicon III, 2/05/1999, p.401-413Publication Quantitative modeling of H2O2 decomposition in SC1
Proceedings paper1998, Proceedings of the 5th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing, 31/08/1997, p.176-183Publication Single step alkaline cleaning solution for advanced semiconductor cleaning
Oral presentation1998, 4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSSPublication Single step alkaline cleaning solution for advanced semiconductor cleaning
Proceedings paper1999, Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon, 21/09/1998, p.23-26