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Alkaline cleaning of silicon wafers: additives for the prevention of metal contamination
Publication:
Alkaline cleaning of silicon wafers: additives for the prevention of metal contamination
Date
1999
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Martin Hoyas, Ana
;
Baeyens, Martien
;
Hub, W.
;
Mertens, Paul
;
Kolbesen, B. O.
Journal
Microelectronic Engineering
Abstract
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1977
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1977
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations