Browsing by Author "Hughes, G."
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Publication Atomic layer deposition of HfO2 thin films on InxGa1-xAs
Publication In-vacuo photoemission studies of the interactions of manganese metal with (3-trimethoxysilylpropyl)diethylenetriamine self-assembled monolayers on SiO2 and Spin-On-Glass
Oral presentation2017, Materials for Advanced Metallization Conference - MAMPublication Progressive breakdown in ultrathin SiON dielectrics and its effect on transistor performance
Journal article2005, Microelectronics Reliability, (45) 5_6, p.869-874Publication The role of atomic oxygen in the decomposition of self-assembled monolayers during area-selective atomic layer deposition
Journal article2022, APPLIED SURFACE SCIENCE, 586, p.152679Publication Weibull slope and voltage acceleration of ultra-thin (1.1-1.14 nm EOT) oxynitrides
Journal article2004, Microelectronic Engineering, (72) 1_4, p.61-65