Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Hughes, Gregory P,"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Mighty hight-t lithography for 65nm generation contacts

    Conley, Will
    ;
    Montgomery, Patrick
    ;
    Lucas, Kevin
    ;
    Litt, Lloyd C.
    ;
    Maltabes, John G.
    ;
    Dieu, Laurent
    Proceedings paper
    2003, Optical Microlithography XVI, 23/02/2003, p.1210-1219

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings