Browsing by Author "Hunsche, Stefan"
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Publication A new paradigm for in-line detection and control of patterning defects
Proceedings paper2015, Metrology, Inspection, and Process Control for Microlithography XXIX, 22/02/2015Publication Characterization and control of dynamic lens heating effects under high-volume manufacturing conditions
Proceedings paper2011, Optical Microlithography XXIV, 27/02/2011, p.79730VPublication Process window and defect monitoring using high-throughput e-beam inspection guided by computational hot spot detection