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Browsing by Author "Hurd, Trace Q"

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    Publication

    Enabling complimentary FET (CFET) fabrication: selective, isotropic etch of Group IV semiconductors

    Kal, Subhadeep
    ;
    Oniki, Yusuke  
    ;
    Falugh, Matthew
    ;
    Pereira, Cheryl
    ;
    Wang, Qi
    ;
    Holsteyns, Frank  
    Meeting abstract
    2019, Advanced Etch Technology for Nanopatterning VIII, 24/02/2019, p.109630L

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