Publication:
Enabling complimentary FET (CFET) fabrication: selective, isotropic etch of Group IV semiconductors
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2042 since deposited on 2021-10-27
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Acq. date: 2026-02-24
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2042 since deposited on 2021-10-27
2last month
1last week
Acq. date: 2026-02-24
Citations