Publication:
Enabling complimentary FET (CFET) fabrication: selective, isotropic etch of Group IV semiconductors
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2041 since deposited on 2021-10-27
2last month
Acq. date: 2026-02-17
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Views
2041 since deposited on 2021-10-27
2last month
Acq. date: 2026-02-17
Citations