Publication:
Enabling complimentary FET (CFET) fabrication: selective, isotropic etch of Group IV semiconductors
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2033 since deposited on 2021-10-27
7last month
Acq. date: 2025-12-08
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Views
2033 since deposited on 2021-10-27
7last month
Acq. date: 2025-12-08
Citations