Browsing by Author "Hurd, Trace Q."

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Selective isotropic etching of Group IV semiconductors to enable gate all around device architectures

Kal, Subhadeep
;
Pereira, Cheryl
;
Oniki, Yusuke
;
Holsteyns, Frank
;
Smith, Jeffrey
;
Mosden, Aelan
Meeting abstract
2018, Surface Preparation and Cleaning Conference - SPCC, 10/04/2018
Si trim applications: benefits and challenges

Kal, Subhadeep
;
Oniki, Yusuke
;
Pereira, Cheryl
;
Holsteyns, Frank
;
Chanemougame, Daniel
Meeting abstract
2019, Surface Preparation and Cleaning Conference (SPCC), 2/04/2019