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Selective isotropic etching of Group IV semiconductors to enable gate all around device architectures
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Acq. date: 2026-02-27
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1 since deposited on 2021-10-25
Acq. date: 2026-02-27
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2724 since deposited on 2021-10-25
20last month
4last week
Acq. date: 2026-02-27
Citations