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Browsing by Author "Hwang, Chan"

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    Publication

    Holistic patterning technology for DRAM 29nm pitch contact hole and pillar patterning

    Park, Seunghak
    ;
    Pham, Van Tuong  
    ;
    Yun, Sangho
    ;
    Jung, Woojin
    ;
    Suh, Hyo Seon  
    ;
    Verstraete, Lander  
    Proceedings paper
    2024, 2024 International Conference on Extreme Ultraviolet Lithography, SEP 30-OCT 03, 2024

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