Publication:

Holistic patterning technology for DRAM 29nm pitch contact hole and pillar patterning

Date

2024

Proceedings Paper

https://doi.org/10.1117/12.3034701

Simple item page Full metadata Statistics

Author(s)

;

Pham, Van Tuong

;

;

;

;

Verstraete, Lander

;

Bae, Hyung Jong

;

;

;

;

;

Journal

N/A

Statistics

152 since deposited on 2025-05-11

2last month

Acq. date: 2026-06-05