Browsing by Author "Hyun, Sangjin"
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Publication Electrical characterization of capacitors with AVD- deposited hafnium silicates as high-k gate dielectric
Journal article2005, Journal of the Electrochemical Society, (152) 11, p.F185-F189Publication High-k dielectrics integration prospects
Proceedings paper2005, ULSI Process Integration IV, 15/05/2005, p.169-192Publication High-k gate stack engineering – towards meeting low standby power and high performance targets
; ; ; ; Proceedings paper2005, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment, 15/05/2005, p.109-117Publication Selective epitaxial Si/SiGe growth for VT shift adjustment in high k pMOS devices
Journal article2007, Semiconductor Science and Technology, (22) 1, p.S110-S113Publication Threshold voltage control in polysilicon or fully-silicided-Hf-based gate dielectric pMOSFETs using controlled lateral oxidation
Meeting abstract2005, Meeting Abstracts 208th Meeting of the Electrochemical Society, 16/10/2005, p.159