Browsing by Author "Hyun, Yoonsuk"
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Publication Dependence of EUV mask printing performance on blank architecture
Proceedings paper2008-03, Emerging Lithographic Technologies XXII, 24/02/2008, p.69211WPublication EUV contact holes and pillars pattering
Proceedings paper2015, Extreme Ultraviolet (EUV) Lithography VI, 22/02/2015, p.94220SPublication Implementing full field EUV lithography using the ADT
; ; ; ; Proceedings paper2008, International Symposium on Extreme Ultraviolet Lithography - EUVL, 28/09/2008