Browsing by Author "Imai, M."
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Publication Efficient method to generate an energy-efficient schedule using operation shuffling.
Journal article2008, IEICE Transactions on Fundamentals of Electronics and Computer Sciences, (E91-A) 2, p.604-612Publication Removal of small (<100-nm) particles and metal contamination in single-wafer cleaning tool
Proceedings paper2003, Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS, 16/09/2002, p.157-161