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Browsing by Author "Isawa, M."

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    Publication

    Inspection and metrology challenges for 3 nm node devices and beyond

    Shohjoh, T.
    ;
    Ikota, M.
    ;
    Isawa, M.
    ;
    Lorusso, Gian  
    ;
    Horiguchi, Naoto  
    ;
    Briggs, Basoene  
    ;
    Mertens, Hans  
    Proceedings paper
    2021, IEEE International Electron Devices Meeting (IEDM), DEC 11-16, 2021

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