Browsing by Author "Isawa, M."
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Publication 3D-DRAM Si/SiGe superlattices: inspection strategies and evaluation
Proceedings paper2025, 2025 Conference on Metrology Inspection and Process Control-Annual, 2025-02-24, p.1342612-1Publication Defect inspection methodology for Contact Holes
Proceedings paper2024, Conference on Metrology, Inspection, and Process Control XXXVIII, 2024-02-28, p.129551FPublication Detection of crystalline defects in Si/SiGe superlattices towards 3D-DRAM applications
Proceedings paper2024, Conference on Metrology, Inspection, and Process Control XXXVIII, 2024-02-28, p.129551FPublication Inspection and metrology challenges for 3 nm node devices and beyond
; ; ; Proceedings paper2021, IEEE International Electron Devices Meeting (IEDM), DEC 11-16, 2021