Publication:

Inspection and metrology challenges for 3 nm node devices and beyond

Date

2021
Proceedings Paper
https://doi.org/10.1109/IEDM19574.2021.9720711
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Author(s)

Shohjoh, T.
;
Ikota, M.
;
Isawa, M.
;
Lorusso, Gian  
;
Horiguchi, Naoto  
;
Briggs, Basoene  
;
Mertens, Hans  
;
Bogdanowicz, Janusz  
;
De Bisschop, Peter  
;
Charley, Anne-Laure  

Journal

na

Abstract

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1634 since deposited on 2022-07-09
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Acq. date: 2026-02-04

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