Browsing by Author "Ivanov, Sergei"
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Publication Area selective atomic layer deposition of molybdenum films on nanoscale metal and metal nitride patterns
;Lee, Se-Won ;Kim, Moo-Sung ;Lee, Changwon ;Ivanov, Sergei; Meeting abstract2020, AVS 20th International Conference on Atomic Layer Deposition (ALD 2020), 28/06/2020