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Browsing by Author "Ivanov, Sergei"

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    Area selective atomic layer deposition of molybdenum films on nanoscale metal and metal nitride patterns

    Lee, Se-Won
    ;
    Kim, Moo-Sung
    ;
    Lee, Changwon
    ;
    Ivanov, Sergei
    ;
    Delabie, Annelies  
    ;
    van der Veen, Marleen  
    Meeting abstract
    2020, AVS 20th International Conference on Atomic Layer Deposition (ALD 2020), 28/06/2020

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