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    On the role of nanocavities in suppressing boron transient enhanced diffusion and deactivation in F+ coimplanted silicon

    Giles, Luis Felipe
    ;
    Stapelmann, Chris
    ;
    Cerva, Hans
    ;
    Jahnel, Franz
    ;
    Demeurisse, Caroline  
    Journal article
    2008, Journal of Applied Physics, (103) 10, p.103525

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