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On the role of nanocavities in suppressing boron transient enhanced diffusion and deactivation in F+ coimplanted silicon
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1836 since deposited on 2021-10-17
1last month
Acq. date: 2026-05-16
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Statistics
Views
1836 since deposited on 2021-10-17
1last month
Acq. date: 2026-05-16
Citations