Publication:
On the role of nanocavities in suppressing boron transient enhanced diffusion and deactivation in F+ coimplanted silicon
Date
| dc.contributor.author | Giles, Luis Felipe | |
| dc.contributor.author | Stapelmann, Chris | |
| dc.contributor.author | Cerva, Hans | |
| dc.contributor.author | Jahnel, Franz | |
| dc.contributor.author | Demeurisse, Caroline | |
| dc.contributor.author | Vrancken, Christa | |
| dc.contributor.author | Hoffmann, Thomas Y. | |
| dc.contributor.imecauthor | Demeurisse, Caroline | |
| dc.contributor.imecauthor | Vrancken, Christa | |
| dc.date.accessioned | 2021-10-17T07:16:23Z | |
| dc.date.available | 2021-10-17T07:16:23Z | |
| dc.date.issued | 2008 | |
| dc.identifier.issn | 0021-8979 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13772 | |
| dc.source.beginpage | 103525 | |
| dc.source.issue | 10 | |
| dc.source.journal | Journal of Applied Physics | |
| dc.source.volume | 103 | |
| dc.title | On the role of nanocavities in suppressing boron transient enhanced diffusion and deactivation in F+ coimplanted silicon | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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