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Browsing by Author "Jandhyala, Radhika"

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    Applying design-based metrology for calibrating an OPC model for FinFET pattering

    Vandeweyer, Tom  
    ;
    Lorusso, Gian  
    ;
    Delvaux, Christie  
    ;
    De Backer, Johan  
    ;
    Jandhyala, Radhika
    Proceedings paper
    2005, Interface, 25/10/2005

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