Publication:

Applying design-based metrology for calibrating an OPC model for FinFET pattering

Date

2005

Proceedings Paper

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Author(s)

Vandeweyer, Tom

;

;

Delvaux, Christie

;

De Backer, Johan

;

Jandhyala, Radhika

;

Azordegan, Amir

;

;

Kaliblotzky, Zeev

;

Ercken, Monique

Statistics

2003 since deposited on 2021-10-16

Acq. date: 2026-03-17