Publication:
Applying design-based metrology for calibrating an OPC model for FinFET pattering
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2017 since deposited on 2021-10-16
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Acq. date: 2026-08-14
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Statistics
Views
2017 since deposited on 2021-10-16
3last month
1last week
Acq. date: 2026-08-14
Citations