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Browsing by Author "Jang, S.A."

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    The influence of defects on campatibility and yield of the HfO2-polysilicon gate stack for CMOS integration

    Kaushik, Vidya
    ;
    De Gendt, Stefan  
    ;
    Carter, Richard
    ;
    Claes, Martine  
    ;
    Röhr, Erika
    ;
    Pantisano, Luigi
    Proceedings paper
    2003, Novel Materials and Processes for Advanced CMOS, 2/12/2002, p.335-340

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