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Browsing by Author "Jang, S.E."

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    Publication

    Issues, achievements and challenges towards intergration of high-k dielectrics

    Heyns, Marc  
    ;
    Bender, Hugo  
    ;
    Caymax, Matty  
    ;
    Carter, R
    ;
    Claes, Martine  
    ;
    Conard, Thierry  
    Proceedings paper
    2002, 5th International Forum on Semiconductor Technology - IFST, 21/02/2002

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