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Publication:

Issues, achievements and challenges towards intergration of high-k dielectrics

Date

2002
Proceedings Paper
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Author(s)

Heyns, Marc  
;
Bender, Hugo  
;
Caymax, Matty  
;
Carter, R
;
Claes, Martine  
;
Conard, Thierry  
;
Boullart, Werner  
;
De Gendt, Stefan  
;
Degraeve, Robin  
;
Deweerd, Wim
;
Groeseneken, Guido  
;
Houssa, Michel  
;
Kubicek, Stefan  
;
Lujan, Guilherme
;
Nohira, H.
;
Pantisano, Luigi
;
Petry, Jasmine
;
Röhr, Erika
;
Vandervorst, Wilfried  
;
Van Elshocht, Sven  
;
Xu, Zhen
;
Zhao, Chao
;
Cartier, E.
;
Chen, J.
;
Cosnier, V.
;
Green, M.
;
Jang, S.E.
;
Kaushik, Vidya
;
Kerber, A.
;
Kluth, J.
;
Lin, S.
;
Tsai, Wilman
;
Young, Edward
;
Manabe, Y.

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2127 since deposited on 2021-10-14
Acq. date: 2025-10-23

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2127 since deposited on 2021-10-14
Acq. date: 2025-10-23

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