Browsing by Author "Janssen, Augustus J.E.M."
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Publication Characterization of a projection lens using the extended Nijboer-Zernike approach
Proceedings paper2002, Optical Microlithography XV, 5/03/2002, p.1392-1399Publication Wafer based aberration metrology for lithographic systems using overlay measurements on targets imaged from phase-shift gratings
; ; de Winter, LaurensJournal article2014, Applied Optics, (53) 12, p.2562-2582