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Browsing by Author "Janssen, Henri"

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    Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process

    Witvrouw, Ann
    ;
    Rusu, C.
    ;
    Janssen, Henri
    ;
    Gunn, Robert
    Journal article
    2004, Microsystem Technologies, (10) 5, p.364-371

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