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Browsing by Author "Jash Patel, Patel"

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    Publication

    RIE dynamics for extreme wafer thinning applications

    Rassoul, Nouredine  
    ;
    Jourdain, Anne  
    ;
    Tutunjyan, Nina  
    ;
    De Vos, Joeri  
    ;
    Sardo, Stefano  
    Meeting abstract
    2017, PESM, 20/10/2017

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