Publication:

RIE dynamics for extreme wafer thinning applications

Date

2017
Meeting abstract
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Author(s)

Rassoul, Nouredine  
;
Jourdain, Anne  
;
Tutunjyan, Nina  
;
De Vos, Joeri  
;
Sardo, Stefano  
;
Inoue, Fumihiro  
;
Piumi, Daniele  
;
Miller, Andy  
;
Beyne, Eric  
;
Walsby, Edward  
;
Jash Patel, Patel
;
Oliver, Ansell
;
Huma, Ashraf
;
Janet, Hopkins
;
Dave, Thomas

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2079 since deposited on 2021-10-24
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Acq. date: 2026-02-27

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