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    Co-optimization of lithographic and patterning processes for improved EPE performance

    Maslow, Mark
    ;
    Timoshkov, Vadim
    ;
    Kiers, Ton
    ;
    Jee, Tae Kwon
    ;
    de Loijer, Peter
    ;
    Morikita, Shinya
    Proceedings paper
    2017, Advanced Etch Technology for Nanopatterning VI, 27/02/2017, p.101490N

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