Publication:

Co-optimization of lithographic and patterning processes for improved EPE performance

Date

2017

Proceedings Paper

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Author(s)

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Timoshkov, Vadim

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;

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de Loijer, Peter

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Morikita, Shinya

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;

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Okada, Soichiro

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Kumar, Kaushik A.

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Biesemans, Serge

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Yaegashi, Hidetami

;

Di Lorenzo, Paolo

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;

;

Beral, Christophe

;

Lariviere, Stephane

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1949 since deposited on 2021-10-24

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Acq. date: 2026-04-25