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Browsing by Author "Jenq, Jyh-Shyang"

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    Ti-salicide improvement by preamorphization for ULSI applications

    Chen, Chun-Cho
    ;
    Wang, Qingfeng
    ;
    Jonckx, Franky
    ;
    Jenq, Jyh-Shyang
    ;
    Maex, Karen  
    Proceedings paper
    1996, Silicide Thin Films - Fabrication, Properties, and Applications, 27/11/1995, p.89-94

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