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Ti-salicide improvement by preamorphization for ULSI applications
Publication:
Ti-salicide improvement by preamorphization for ULSI applications
Date
1996
Proceedings Paper
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1092.pdf
272.49 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chen, Chun-Cho
;
Wang, Qingfeng
;
Jonckx, Franky
;
Jenq, Jyh-Shyang
;
Maex, Karen
Journal
Abstract
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1936
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations
Metrics
Views
1936
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations