Publication:

Ti-salicide improvement by preamorphization for ULSI applications

Date

1996
Proceedings Paper
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dc.contributor.authorChen, Chun-Cho
dc.contributor.authorWang, Qingfeng
dc.contributor.authorJonckx, Franky
dc.contributor.authorJenq, Jyh-Shyang
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-09-29T14:18:43Z
dc.date.available2021-09-29T14:18:43Z
dc.date.embargo9999-12-31
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1115
dc.source.beginpage89
dc.source.conferenceSilicide Thin Films - Fabrication, Properties, and Applications
dc.source.conferencedate27/11/1995
dc.source.conferencelocationBoston, MA USA
dc.source.endpage94
dc.title

Ti-salicide improvement by preamorphization for ULSI applications

dc.typeProceedings paper
dspace.entity.typePublication
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