Browsing by Author "Joa, Gaehun"
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Publication Wafer-Level Vacuum Sealing for Packaging of Silicon Photonic MEMS
;Joa, Gaehun ;Edinger, Pierre ;Bleiker, Simon J. ;Wang, XiaojingTakabayashi, Alain YujiProceedings paper2021, Conference on Silicon Photonics XVI, MAR 06-11, 2021