Browsing by Author "Johanesen, Hayley"

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Evaluation of the accuracy and precision of STEM and EDS metrology on horizontal GAA nanowire devices

Johanesen, Hayley
;
Strauss, Michael
;
Kenslea, Anne
;
Hakala, Chris
;
Kwakman, Laurens
Proceedings paper
2019, Metrology, Inspection, and Process Control for Microlithography XXXIII, 24/12/2019, p.109591C
Statistical significance of STEM based metrology on advanced 3D transistor structures

Kwakman, Laurens
;
Kenslea, Anne
;
Johanesen, Hayley
;
Strauss, Michael
;
Boullart, Werner
Proceedings paper
2019, Metrology, Inspection, and Process Control for Microlithography XXXIII, 24/02/2019, p.109590C