Publication:
Evaluation of the accuracy and precision of STEM and EDS metrology on horizontal GAA nanowire devices
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1928 since deposited on 2021-10-27
1last month
Acq. date: 2026-04-06
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Statistics
Views
1928 since deposited on 2021-10-27
1last month
Acq. date: 2026-04-06
Citations