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Browsing by Author "Johansson, Henrik"

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    Patterning of 25nm contact holes at 90nm pitch: combination of L/S double exposure immersion lithography and plasma-assisted shrink technology

    de Marneffe, Jean-Francois  
    ;
    Lazzarino, Frederic  
    ;
    Johansson, Henrik
    ;
    Truffert, Vincent  
    Meeting abstract
    2010, Gaseous Electronics Conference - GEC, 4/10/2010

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