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Patterning of 25nm contact holes at 90nm pitch: combination of L/S double exposure immersion lithography and plasma-assisted shrink technology
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1875 since deposited on 2021-10-18
Acq. date: 2026-02-24
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Statistics
Views
1875 since deposited on 2021-10-18
Acq. date: 2026-02-24
Citations