Browsing by Author "Johnson, Stephen"
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Publication Complementary dipole exposure solutions at 0.29k1
Proceedings paper2005, Optical Microlithography XVIII, 27/02/2005, p.327-338Publication Through-pitch characterization and printability for 65nm half-pitch alternating aperture phase shift applications
Proceedings paper2005, Photomask and Next-Generation Lithography Mask Technology XII, 13/04/2005, p.211-222