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Browsing by Author "Jonas, A."

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    Characterization of PVD TaN and ALD WNxCy copper diffusion barriers on a porous CVD low-k material

    Travaly, Youssef
    ;
    Kemeling, N.
    ;
    Maenhoudt, Mireille
    ;
    Peeters, S.
    ;
    Tokei, Zsolt  
    ;
    Abell, Thomas
    Proceedings paper
    2004, Advanced Metallization Conference 2003, 21/10/2003, p.723-728

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