Publication:
Characterization of PVD TaN and ALD WNxCy copper diffusion barriers on a porous CVD low-k material
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1954 since deposited on 2021-10-15
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Acq. date: 2026-10-04
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1954 since deposited on 2021-10-15
1last month
1last week
Acq. date: 2026-10-04
Citations