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Browsing by Author "Jonas, A.M"

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    A theoretical and experimental study of atomic-layer-deposited films onto porous dielectric substrates

    Travaly, Youssef
    ;
    Schuhmacher, Jorg
    ;
    Baklanov, Mikhaïl
    ;
    Giangrandi, Simone
    ;
    Richard, Olivier  
    Journal article
    2005-10, Journal of Applied Physics, (98) 8, p.083515-1-083515-9

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