A theoretical and experimental study of atomic-layer-deposited films onto porous dielectric substrates

Travaly, Youssef; Schuhmacher, Jorg; Baklanov, Mikhaïl; Giangrandi, Simone; Richard, Olivier; Brijs, Bert; Van Hove, Marleen; Maex, Karen; Abell, Thomas; Somers, K.R.F; Hendrickx, M.F.A; Vanquickenborne, L.G.; Ceulemans, A.; Jonas, A.M

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A theoretical and experimental study of atomic-layer-deposited films onto porous dielectric substrates

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2005-10

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Vanquickenborne, L.G.

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Ceulemans, A.

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Jonas, A.M

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Journal of Applied Physics

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A theoretical and experimental study of atomic-layer-deposited films onto porous dielectric substrates

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