Publication:
A theoretical and experimental study of atomic-layer-deposited films onto porous dielectric substrates
Date
| dc.contributor.author | Travaly, Youssef | |
| dc.contributor.author | Schuhmacher, Jorg | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Giangrandi, Simone | |
| dc.contributor.author | Richard, Olivier | |
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | Van Hove, Marleen | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Abell, Thomas | |
| dc.contributor.author | Somers, K.R.F | |
| dc.contributor.author | Hendrickx, M.F.A | |
| dc.contributor.author | Vanquickenborne, L.G. | |
| dc.contributor.author | Ceulemans, A. | |
| dc.contributor.author | Jonas, A.M | |
| dc.contributor.imecauthor | Richard, Olivier | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
| dc.date.accessioned | 2021-10-16T05:47:14Z | |
| dc.date.available | 2021-10-16T05:47:14Z | |
| dc.date.issued | 2005-10 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11331 | |
| dc.source.beginpage | 083515-1 | |
| dc.source.endpage | 083515-9 | |
| dc.source.issue | 8 | |
| dc.source.journal | Journal of Applied Physics | |
| dc.source.volume | 98 | |
| dc.title | A theoretical and experimental study of atomic-layer-deposited films onto porous dielectric substrates | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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