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Browsing by Author "Jonville, Carole"

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    Highly manufacturable FinFETs with sub-10nm fin width and high aspect ratio fabricated with immersion lithography

    Van Dal, Mark  
    ;
    Collaert, Nadine  
    ;
    Doornbos, Gerben  
    ;
    Vellianitis, Georgios  
    ;
    Curatola, Gilberto
    Proceedings paper
    2007, Symposium on VLSI Technology. Digest of Technical Papers, 14/06/2007, p.110-111

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