Browsing by Author "Jouve, Amandine"
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication Characterization of extreme ultraviolet resists with interference lithography
Oral presentation2005, 31st International Conference on Micro-and Nano- EngineeringPublication Microstepper vs. interference EUV lithography: effects on resist profiles
Proceedings paper2005, 4th International Symposium on EUV Lithography, 7/11/2005