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Browsing by Author "Jumel, Helene"

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    N10 SADP bulk FinFET depth micro loading improvement with bias pulsing plasma

    Tao, Zheng  
    ;
    Vos, Ingrid  
    ;
    Altamirano Sanchez, Efrain  
    ;
    Xu, Kaidong
    ;
    Hellin, David  
    Meeting abstract
    2014, Plasma Etch and Strip in Microtechnology - PESM, 12/05/2014, p.P14

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